Facilities’ Growth: Construction, New Operations and Talent Shortage

• Time-to-market – speed of construction (this can include Pre-construction and Modularization of facilities)
• Time-to-market – compressed time for commissioning
• Lack of capacity/availability of qualified suppliers
• Staffing for operations and the training of new engineers
• Supply chain issues
• Information management to support fast decisions – IP protection, ability to accurately project needs
• Existing system support
• Construction of EUV capable facilities

Facilities’ Environmental Sustainability and the Footprint of Electrical and Water Infrastructure:

• Increase water usage
• Limited or strained water availability
• Impact of new chemistries on POTW
• Relationship between water and energy
• Infrastructure availability
• Growing complexity of wastewater compliance management, driven by both manufacturing technology changes and regulatory pressure
• CO2 reduction and use of renewable energy
• PFAS reduction in wastewater streams
• Brine management
• Reclaiming chemicals
• UPW reduction and reclaim
• Energy conservation reduction
• VOC exhaust reduction
• Compliance management driven by both manufacturing technology changes and regulatory pressure
• CO2 reduction and use of renewable energy
• Developing tools to understand basic relationships, e.g. between recycling and carbon footprint
• Gases Abatement

Ensuring Yield and Reliability

• UPW system matching, creating similar quality from different systems
• Dissolved nitrogen and dissolved oxygen and its impact on product yield and reliability
• Particles and particle precursors in UPW and liquid chemicals – proactive control via improved materials and system performance
• UPW recycling vs. growing UPW quality requirements
• Next generation UPW and liquid chemical systems to support future technology needs
• Use of big data and machine learning to correlate yield and facility system performance, potentially addressing issue of lacking inline metrology
• Next generation of high purity materials for delivery systems (driven by higher purity requirements, PFAS, etc.)
• Chemical purification onsite vs at the devoted chemical facilities

Submit an Abstract

Present your solutions to the microelectronics industry at this year’s Ultrapure Micro 2022 conference, taking place September 28th – 30th.
The deadline for abstract submissions is May 23rd. To get more information about important deadlines and submissions criteria click here.