Facilities’ Growth: Construction, New Operations and Talent Shortage
- Time-to-market – speed of construction (this can include Pre-construction and Modularization of facilities)
- Time-to-market – compressed time for commissioning
- Lack of capacity/availability of qualified suppliers
- Staffing for operations and the training of new engineers
- Supply chain issues
- Information management to support fast decisions – IP protection, ability to accurately project needs
- Existing system support
- Construction of EUV capable facilities
Facilities’ Environmental Sustainability and the Footprint of Electrical and Water Infrastructure:
- Increase water usage
- Limited or strained water availability
- Impact of new chemistries on POTW
- Relationship between water and energy
- Infrastructure availability
- Growing complexity of wastewater compliance management, driven by both manufacturing technology changes and regulatory pressure
- CO2 reduction and use of renewable energy
- PFAS reduction in wastewater streams
- Brine management
- Reclaiming chemicals
- UPW reduction and reclaim
- Energy conservation reduction
- VOC exhaust reduction
- Compliance management driven by both manufacturing technology changes and regulatory pressure
- CO2 reduction and use of renewable energy
- Developing tools to understand basic relationships, e.g. between recycling and carbon footprint
- Gases Abatement
Ensuring Yield and Reliability
- UPW system matching, creating similar quality from different systems
- Dissolved nitrogen and dissolved oxygen and its impact on product yield and reliability
- Particles and particle precursors in UPW and liquid chemicals – proactive control via improved materials and system performance
- UPW recycling vs. growing UPW quality requirements
- Next generation UPW and liquid chemical systems to support future technology needs
- Use of big data and machine learning to correlate yield and facility system performance, potentially addressing issue of lacking inline metrology
- Next generation of high purity materials for delivery systems (driven by higher purity requirements, PFAS, etc.)
- Chemical purification onsite vs at the devoted chemical facilities
Submit an Abstract
Present your solutions to the microelectronics industry at this year’s Ultrapure Micro 2022 conference, taking place September 28th – 30th.
The deadline for abstract submissions is May 23rd. To get more information about important deadlines and submissions criteria click here.