Jinjin Wang

Technical Community Leader, Scientist III, Air Liquide Electronics US – Balazs Nanoanalysis


Dr. Jinjin Wang is a technical community leader, senior scientist at Air Liquide Electronics US – Balazs Nanoanalysis, Fremont, CA, USA. By using ICP-MS (inductively coupled plasma – mass spectrometry) with his expertise, he has been working on trace amount elemental impurities analysis for Si-based and high-k ALD precursors used in semiconductor processing. He also uses ICP-MS to characterize nanoparticles in UPW and high-purity liquid chemicals (including ALD precursors) used in semiconductor manufacturing to provide information of particle elemental composition, concentration, size and size distribution. With technology node becoming down to 10nm, 5nm or less, he is focusing on further bringing down elemental content DL (detection limit) of ALD precursors and analyzing nanoparticle routinely to reach single-digit nm size, to meet semiconductor new demanding/specification of analysis of elemental and nanoparticle impurities. In 1996, Jinjin was rewarded a Ph.D. degree in Physical Chemistry for conducting studies of elementary chemical reactions by reactive scattering in crossed-supersonic molecular beams from Chemistry Department, University of Manchester, England, UK. He was a Caltech Postdoctoral Scholar and research fellow to conduct chemical kinetics studies by quantitatively characterizing transient and final trace chemical reaction products at Jet Propulsion Laboratory, California Institute of Technology and Rice University. In addition, as a research fellow to study molecular spectroscopy, and nanoparticle sampling, chemical characterization by laser ablation & TOF (time-of-flight) mass spectrometry at University of Utah and at University of Delaware. Jinjin has authored and co-authored journal articles, and has given conference presentations to academic and industrial audiences. His recent presentations are on Ultrapure Micro 2018, 2019; and ALD_ALE 2019.