Alois Goller is Lead Systems Engineer at Lam Research AG in Villach, Austria. He has a degree in computer science (M.Sc.) from Technical University of Graz (TUG, Austria) and a Ph.D. degree, also from TUG. He has more than 10 years of experience in the semiconductor industry, specifically on spin clean tools. As Lead Systems Engineer he technically leads and is responsible for the development of new features and tools at Lam Research AG. His focus is on Front End of Line (FEoL) tools and on on-wafer particle reduction. Alois also holds several patents related to semiconductor spin clean tools.