Abbas Rastegar is Principal Member of Technical Staff and Sr. Director of Technology in Applied Materials. He is currently working on technology development for Epi tools with a focus on science and technology involved in surface cleaning and contamination control at the molecular level by using reactive gases and plasma.
Prior to joining the Epi division, Dr. Rastegar managed EUV Mask Substrate development and polishing, EUV Mask Blank (Integration, Cleaning, Metrology) in Applied Materials in Singapore and Japan.
Prior to joining Applied Materials, he was a Lithography Fellow at SEMATECH Albany, USA, where he directed research at the Nano Defectivity Center (NDC) and managed the EUV Mask Cleaning program for 12 years. Prior to moving to industry, Dr. Rastegar was heading a research group on “Macromolecules and Liquid Crystals” at the University of Nijmegen in the Netherlands. He has more than 28 years of R&D experience in different physics, nanoscience, and nano-technology disciplines, with more than 150 published papers in technical journals and conferences. He has Ph.D. in Physics from University of Ljubljana Slovenia in collaboration with International Center for Theoretical Physics in Trieste Italy. He has a diploma (M.Sc. equivalent) in Advanced Condensed Matter Theory from International Center for Theoretical Physics. Abbas received his M.Sc. in Solid State Physics and B.Sc. in Applied Physics from Ferdowsi University, Mashhad Iran.