*Subject to final approval

Ultrapure Micro 2023 is set to present 40+ data-driven technical presentations. Each has been selected for its practical value, focus on critical end user challenges, and capacity to drive industry best-practise forwards. Alongside panel discussions, roundtables, networking and more, they provide immediately practical insights to inform your current operations.

High Purity Environments
  • Determination of trace level organic contamination leached from HDPE containers used for semiconductor solvents and recovery and identification of organic residues on wafer surfaces using these contaminated solvents
  • Next Generation Filters for On-Wafer Defect Control with Fine-Purification Solutions for IPA and other Aqueous Solvents (targeted retention) for Microelectronics Application
  • Online monitoring of traditional and emerging airborne molecular contaminants at pptv concentrations
  • Advancements in PTR-TOF Technology for Improved Real-Time AMC Monitoring
  • Impact of H2O2 Concentration in UPW on (Ultra) Filters Performance
  • A surprising result when PVDF pipe installed for 9 years was tested for extractables.
  • Predicting Hydrogen Peroxide concentration for effective control in Ultrapure Water Polishing Loop
  • Use of Fluorescent Molecules as Surrogate Nano-contaminants to Monitor the Integrity of Reverse Osmosis Membranes in Ultrapure Water Systems
  • A novel nanoparticle counter for UPW based on acoustic cavitation
  • Interaction of Nanoparticles with Ion Exchange Resin Beds in UPW polish systems
  • Identification and Management of Organic Particle Precursors in Ultrapure Water
  • Application of a New SEMI Guide for Evaluating Particle Precursor Metrology
  • Predicting filtration performance using proxy particles
  • Advancing process control based on enhanced particle counter matching at the 20nm level
  • Use of Hybrid metrology approach to develop holistic filtration solutions in Hydrogen Peroxide
Environmental Sustainability
  • Case studies on semiconductor ultrapure water and wastewater reclamation using the latest generation of RO Membranes
  • Developing Water Reclaim Solutions for Existing Fabs 
  • Systematic Process Technology Selection for treating SiC containing Waste Water
  • Overcoming challenges in reclaiming wet bench rinse waters back into a UPW system
  • Water reclamation into UPW systems
  • Building a more Sustainable Cu-CMP Process: Selective Copper Removal and Recovery
  • Not-So-Forever Chemicals: Field Demonstration of PFAS Destruction by a Pilot-Scale Nanofiltration and UV-Sulfite Treatment Train
  • Unlocking Opportunities for Reaching Sustainability Goals for Existing and New Fab’s
  • Water and Energy Nexus: Resolving Conservation Challenges in the Refinery Industry and Its Relevance to the Semiconductor Sector
  • Process Cooling Water (PCW) Reliability Improvement
  • Balancing ESG Goals and Zero Liquid Discharge
  • Energy and water use efficiency considerations in Ultrapure and wastewater system design and operation for semiconductor fabs
  • Azoles removal from CMP wastewater – Oxidation vs. Novel Complexation Method
  • Municipal waste treatment chemical inhibitors and the impacts on facilities waste treatment system design
  • Reclaim of Ozonated Water
  • Suggestion on Eco-Friendly Operation of Ultrapure Water production process (focusing on the operation case of K-water membrane filtration)
  • PFAS Analysis in UPW and Process Water 
Facilities’ Growth & Efficiency
  • Accelerating Water Technology Innovation in the Semiconductor Industry
  • HFRO: A Capacity Crunch Paves the Road to Future Development Title Trouble shooting list during a trial run in a new UPW system (100m3/hr)
  • Suitability evaluation of PVC and PVDF pipes for ultrapure water production system
  • Leveraging data driven workflows to shorten the design change lifecycle
  • A paradigm shift for wastewater recycling operations using AI
  • Modular OSM Constructs for Improved Cost, Schedule, EHS and Environmental Benefit
  • Digitalized MLD and ZLD: Optimizing Through Modularization of Membrane and Thermal Systems
  • Strategies for accelerating startup of a UPW System
  • Smart/Intelligent P&ID’s: How to more efficiently go from a P&ID to a detailed drawing and BOM
  • Optimization of the primary pure water system configuration and new operational control for enabling minimal energy consumption on ultrapure water producing systems

Companies presenting papers at UPM 2023 include: