ABSTRACTS SUBMITTED FOR UPM 2021

*Subject to formal approval process

Ultrapure Water

  • Ultrapure water(UPW) manufacturing hollow fiber membrane-type membrane degassing process development
  • Reliability evaluation of liquid particle counter (LPC) using field-flow fractionation toward accurate particle measurement
  • The UPW filter cascade: Functions, Risks and Recommendations
  • Measurement of TOC and Fluorine Ion Extraction Rates from Polymeric Piping in Hot Ultrapure Water
  • Effect of dissolved gas in UPW on particle detection using acoustic particle counters
  • Proactive Quality Management in the UPW Polish System
  • Development of Advanced Particle Analysis for Sub-10 nm Particles
  • Nanoparticle Adsorption of Polish IEX resins investigated by MRI
  • Nanoparticles Characterization for Semiconductor UPW Production System Monitoring Using ICP-MS
  • Functional water solutions to enable advanced wet cleaning process for next-generation semiconductor device manufacturing
  • Long-term installation confirms thermoplastic pipe stress modeling and design rules – Best Known Methods (BKM`s)
  • A detailed review of a HUPW piping installation after 20 years of use
  • Alternative to Persulfate TOC Method for Semiconductor Water
  • High throughput online VPD-ICPMS for automated determination of metal contaminants on process wafers
  • Study on particle behavior in ultrapure water
  • Calibration of CPC Detection Efficiency Using Mono-Disperse Aerosols

Water Management

  • Doing More with Less – Minimizing Data Center Water and Wastewater
  • The Business of Saving Water
  • Electrodialysis Reversal Enhanced by Ceramic Membranes for Recycling of Copper Wastewater
  • Development of Breakthrough Solutions via Clever Water Management Strategy
  • Hydrogen Peroxide Removal: GAC or Enzyme Approach?
  • Solutions to the Isopropanol Abatement challenge
  • HF Neutralization plants – lots of solids – huge potential for optimization
  • Achieving 99% Water Recovery with Membrane System Arrangements
  • Diversion of Hydrofluoric Acid and Ethylene Glycol Mix to Fluoride Wastewater for Treatment
  • Effective and incremental operation methods to improved cooling tower performance utilizing filtration
  • Navigating Business Continuity During a Natural Disaster While in the Midst of a Pandemic
  • Minimizing risk of leveraging existing, aging facilities to support new and existing manufacturing needs
  • Quantitative Polymerase Chain Reaction (qPCR) in Water Systems (for Biofilm Management in Water Systems)

Ultra-High Performance Chemicals

  • Metal removal life test and organic impurity of ion exchange resin
  • Sub-10nm particle detection on 300mm wafers
  • Analysis of Trace Level Organic Compounds in Water and Sulfuric Acid Using Solid Phase Extraction Gas Chromatography – Mass Spectrometry
  • A Practical Method Detection Limit (MDL) Determination Methodology Using Quality Data
  • Native Particle and Metal Removal in Isopropyl Alcohol – A Study on Optimization of Filtration Schemes
  • The Current Effort to Limit or Eliminate Fluorocarbon materials
  • The Challenges of Chemical Waste Reclamation and Potential Re-use within the semiconductor industry

AMC & Gases

  • Quantum Cascade Laser Cavity Ring-Down Spectroscopy Analyzers for PPT-level CO and CO2 Detection
  • Measurement of nanoparticles and their precursors
  • Detecting Aerosol Events Caused by Nanoparticles
  • Real-time monitoring of AMCs with PTR-TOF – From Lab to Fab
  • Enhanced rate-of-rise measurements using oxygen

COMPANIES REPRESENTED AT UPM 2021

*Subject to review by co-moderating team

Air Liquide Electronics – Balazs Nanoanalysis
Airmodus Ltd.
ChemTrace
CT Associates, Inc
DAS Environmental Expert GmbH
EMD Electronics
Entegris
Evoqua Water Technologies
FTD Solutions
Georg Fischer Piping Systems Ltd.
HDR
Hexisense SA
Intel
K-water Institute
Kanomax

Kurita
Membrion
Organo Corporation
Ovivo Switzerland AG
Pall GmbH
Saltworks Technologies
Samsung Austin Semiconductor
Sharrett
Team1 Core Technology Group II, Research and Development Division
Tiger Optics
TSI Incorporated
Uhlmeyer
Unisers Ltd.