IRDS: Devices and Systems Innovation in the Next 15 Years
Paolo Gargini, Chairman, IRDS
Day Two Keynote
Semiconductor Market Trends – Optimistic Uncertainty of 2020 and Beyond
Dave Anderson, President, SEMI Americas
Day Three Keynote
IRDS Yield Enhancement: discussing the importance and the process of the contamination control roadmap development
Slava Libman, CEO, FTD Solutions
2020 PRESENTATIONS
Ultrapure Water
Endotoxin Reduction in UPW
Comparison of Particle Shedding from High-Purity UPW Distribution Piping
Yield Enhancement in Wet Cleaning of Silicon Wafers by Critical Area Analysis
Microanalysis: A Novel Method to Characterize and Speciate Contaminants in Ultra Pure Water and Other Aqueous Chemicals
Can Nanoparticles Penetrate UPW Polishing Resins? Nanoscale Particle Interactions by High Resolution Imaging of Single Resin Beads
Removal of Trace Metals from Ultra Pure Water using Membrane-based Solutions
Trace Metal Analysis (ppq level) in Ultra Pure Water using Monolith as an Ion Concentrator
Leveraging Advanced Analytical Techniques and Productive Data Processing Tools to Address UPW Challenges
Fundamentals of Acoustic Particle Counting and Validation for UPW Monitoring
Approaching UPW System Management and Design in a Systematic Way
Best Practice in the Design and Fabrication of Fluoropolymer-lined vessels as reliable Ultra-High Purity Fluid Containment Systems: Influence of Material Selection, Fabrication Methods on Tank Performance
Determine Functional Pore Sizes of Ultrafiltration Membranes by Nanoparticle Retention Test using Single Particle ICP-MS
New Quartz Glass – Electric Melting of a Synthetic “Grain” in an Inert Atmosphere with High, Non-removable OH Content in the Glass Structure– tailored for 185nm Ultrapure Water Application
Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor
Risks Incurred by Morphology Change of Silica in Ion Exchange Resins and their Countermeasures
Understanding Nanoparticle Contamination in Ultrapure Water Generation and Distribution
Sub-10nm defect inspection of unpatterned wafers by UNISERS and its application to UPW defectivity analysis
Thermoplastic Pipe Stress Modelling – Best Known Methods for Safe and Reliable Long-life Double Containment Piping Systems
Resource Conservation Projects at GLOBALFOUNDRIES Fab8 in Malta, New York
Durability Improvement of Fluoride Ion Sensor Against Hydrogen Peroxide in Wastewater Management
Construction of a New Wastewater Recovery System/Business Model
Rapid Detection of Biofouling in Cooling Water Systems
Options to Manage PFAS Compounds in Wastewater: A Reverse Osmosis/Membrane Perspective
Managing the Biocide Measurement, Control & Regulatory Challenges in Wastewater Dechlorination and Disinfection using online TRO (Total Residual Oxidant) Analyzer
Condenser Loop Best Known Methods
Hydrofluoric Acid Neutralization and Precipitation Utilizing High Performance Lime
High Purity Chemicals & Gases and Airborne Molecular Contamination
New Sampling Module for Ultra-low Level Cation, Anions, and Organic Acids in Air/Gases
Effects of Static Electricity on Voltage-sensitive Metrology for Chemical Delivery Systems
Method Development for Trace Metal Impurities in Novel Sub-nm Photoresists by Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
When Should Skew Corrected Control Limits be Updated?
A Retrospective Review of AMC Issues: Our Understanding and Issues Incurred
The Challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in Cleanrooms
Comprehensive Online AMC Analysis Using SIFT-MS
2020 ROUNDTABLES
Critical Components Analysis
AMC Metrology
New Challenges of Specialty Waste Treatment Systems
Evaluating UPW System Capacity and Minimizing Upgrade Scope
Filter Rating and Testing – What does it mean?
New Challenges to Ultrapure Water Filtration
Selection of Piping Materials for Wastewater Collection Systems and Hydrogen Peroxide in Wastewater
Best Practices for POU Scrubber Wastewater Management
HF Treatment – Lime or CaCl2 – which is best for me?
Key Lessons and Considerations in UPW and HUPW Distribution Shutdown and Restart
Fab Tool Water Optimization and Reclamation
UPW Sampling and Lab Testing: How often, which samples, what parameters, methods?
What is new in UPW membrane technology?
Sampling and Analysis of In-Line and End-of-Line High Performance Chemicals
AMC – Fab & Tool Environment
Ultra High Performance Chemical Distribution and Blending
Next Generation Particle Metrology for UPW for Particle Pre-Cursor Measurement
Supply Chain Challenges and the Cost of Quality – Chemicals
Filtration for UHP Chemicals – Which filter is which and where do I use it?
AMC – FOUP & Mini-Environment
Instrumentation Selection in Wastewater
Ion Exchange Resin Management: lifetime, triggers, operation, strategy
Design for Maintenance & Operation Principles in UPW Systems – End User Perspective
Basics of High Purity Gas Delivery for Semiconductor Applications: from cylinder to bulk to onsite generation
