Ultrapure Micro 2020 - Day 3

Wednesday November 11th

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7:30-7:35 PST

Welcome Remarks

7:35-8:20 PST

Panel Discussion

IRDS Yield Enhancement Panel

Discussing the importance and the process of the contamination control roadmap development

Moderator: Slava Libman, CEO, FTD Solutions

Panelists: 

Bob McIntosh, Enviro-Energy Solutions
Christoph Hocke, Infineon
Andreas Neuber, Applied Materials 
Dan Wilcox, Page/imes​
Nabil Mistkawi, Samsung Austin Semiconductor 
Kevin Prettyman, GLOBALFOUNDRIES

8:20-8:25 PST

Introduction to Technical Sessions

Technical sessions are broken up into 15 minute presentations. Each session ends with a Q&A panel with all session speakers.

8:25-8:30 PST

Transition Break

8:30-9:45 PST

UPW Contamination Control

8:30-8:45 PST

Understanding Nanoparticle Contamination in Ultrapure Water Generation and Distribution

Glen Slayter, Intel and Dan Rodier, Particle Measuring Systems

8:45 -9:00 PST

Trace metal analysis (ppq level) in ultrapure water using Monolith as an ion concentrator

Kyohei Tsutano, ORGANO

9:00 -9:15 PST

Removal of trace metals from Ultra Pure Water (UPW) using membrane-based solutions

Sid Sampath, Entegris

9:15-9:45 PST

Q&A Panel

8:30-9:45 PST

UPW AND LIQUID CHEMICALS SYSTEM IMPROVEMENTS

8:30-8:45 PST

New quartz glass – electric melting of a synthetic “grain” in an inert atmosphere with high, non-removable OH content in the glass structure – tailored for 185nm ultrapure water applications

Klaus Zoltner, Heraeus

8:45 -9:00 PST

Thermoplastic pipe stress modelling – Best Known Methods (BKM’s) for safe and reliable long-life Double Containment Piping Systems

Hanspeter Mueller, George Fischer Piping Systems

Co-authoring organization: Semtec Inc.

9:00 -9:15 PST

Best Practice in the Design and Fabrication of Fluoropolymer-lined vessels as reliable Ultra-High Purity Fluid containment systems: Influence of material selection, fabrication methods on tank performance

Steve Rau, Edlon

9:15-9:45 PST

Q&A Panel

8:45-9:45 PST

Water Management in Cooling Systems

8:30-8:45 PST

Condensor Loop Best Known Methods

Alex Evashenk, FTD Solutions

8:45-9:00 PST

Rapid Detection of Biofouling in Cooling Water Systems

Philip Yu, Nalco

9:15-9:45 PST

Q&A Panel

8:45-9:45 PST

Wastewater Treatment and Environmental Compliance

8:45-9:00 PST

Managing the Biocide Measurement, Control & Regulatory Challenges in Wastewater Dichlorination and Disinfection using online TRO (Total Residual Oxidant)

Jiawei Zhang, Thermo Fisher Scientific

9:00 -9:15 PST

Options to manage PFAS compounds in wastewater: A Reverse Osmosis/Membrane perspective

Juan Zepeda, Suez Water Technologies and Solutions

9:15-9:45 PST

Q&A Panel

9:45-9:50 PST

Transition Break

9:50-10:00 PST

Closing Remarks

10:00-11:00 PST

Networking