ACCEPTED ABSTRACTS

Ultrapure Water and Water Management

  • Managing the Biocide Measurement, Control & Regulatory Challenges in Wastewater Dechlorination and Disinfection using online TRO (Total Residual Oxidant) AnalyzerJiawei Zhang, Thermo Fisher Scientific
  • Particle Analysis of Unpatterned Wafers with UNISERSAli Ozhun Altun, UNISERS
  • Nanoparticle Filters in UPW Applications – Improved Performance and Extended Lifetime for all Relevant NanoparticlesJochen Ruth, Pall Corporation
  • Endotoxin Reduction in UPWMajid Entezarian, 3M
  • Measurement of Particle Precursors in Ultrapure WaterGary von Schooneveld, CT Associates
  • Options to Manage PFAS Compounds in Wastewater: A Reverse Osmosis/Membrane PerspectiveJuan Alfredo Zepeda, SUEZ Water Technologies and Solutions
  • Yield Enhancement in Wet Cleaning of Silicon Wafers by Critical Area Analysis, Drew Sinha, Sinha Solutions
  • Resource Conservation Projects at GLOBALFOUNDRIES Fab8 in Malta, New YorkThomas Huang, GLOBALFOUNDRIES
  • Microanalysis: A Novel Method to Characterize and Speciate Contaminants in Ultra Pure Water and Other Aqueous Chemicals, Ashutosh Bhabhe, Entegris
  • Can Nanoparticles Penetrate UPW Polishing Resins? Nanoscale Particle Interactions by High Resolution Imaging of Single Resin BeadsMaria Pia Herrling, Ovivo Switzerland AG
  • Removal of Trace Metals from Ultra Pure Water using Membrane-based Solutions, Siddarth Sampath, Entegrits Inc.
  • Thermoplastic Pipe Stress Modelling – Best Known Methods for Safe and Reliable Long-life Double Containment Piping SystemsHanspeter Mueller, George Fischer Piping Systems
  • Ion Exchange Resin Testing, How Do I Understand What Has Been ReportedDonald Downey, Canadian Sales Manager, Purolite Corporation
  • Condenser Loop Best Known MethodsAlex Evashenk, FTD Solutions
  • Trace Metal Analysis (ppq level) in Ultra Pure Water using Monolith as an Ion ConcentratorKyohei Tsutano, ORGANO
  • Leveraging Advanced Analytical Techniques and Productive Data Processing Tools to Address UPW ChallengesAlex Evashenk, FTD Solutions
  • Fundamentals of Acoustic Particle Counting and Validation for UPW MonitoringNajib Alia, Ovivo Switzerland AG
  • Construction of a New Wastewater Recovery System/Business ModelYu Tanaka, Kurita Water
  • Water Management, Wastewater Treatment and Energy ConservationKuang Cuhn Chou, ASE Group
  • A New Era in Pro-active UPW Quality Advancement for Metals and Particles: Design and Operation of a Metal-free UPW Polishing LoopPhilippe Rychen, Ovivo Switzerland AG
  • Approaching UPW System Management and Design in a Systematic Way, Josh Best, FTD Solutions
  • Durability Improvement of Fluoride Ion Sensor Against Hydrogen Peroxide in Wastewater ManagementTakamasa Kinoshita, HORIBA Advanced Techno, Co., Ltd
  • Best Practice in the Design and Fabrication of Fluoropolymer-lined vessels as reliable Ultra-High Purity Fluid Containment Systems: Influence of Material Selection, Fabrication Methods on Tank PerformanceSteve Rau, Edlon Inc.
  • Biological Point of Use Wastewater Treatment, Joerg Winter, DAS Environmental Expert
  • Rapid Bacteria Testing for Real-time Assessment of Water Systems: Successes, Challenges and AdaptationsLisa Rogers, Mycometer Inc
  • Determine Functional Pore Sizes of Ultrafiltration Membranes by Nanoparticle Retention Test using Single Particle ICP-MS, Charlie Chan, 3M
  • Smart Primary Wastewater Management – Strategies, Rules, Examples, Gerd Heser, Pall Corporation
  • Rapid Detection of Biofouling in Cooling Water SystemsPhilip Yu, Nalco Water, an Ecolab Company
  • Hydrofluoric Acid Neutralization and Precipitation Utilizing High Performance Lime, Lauren Marlatt, L’Hoist
  • New Quartz Glass – Electric Melting of a Synthetic “Grain” in an Inert Atmosphere with High, Non-removable OH Content in the Glass Structure – tailored for 185nm Ultrapure Water ApplicationKlaus Zoltner, Heraeus
  • An Operational Rethinking of Site Leadership in Facilities, David LeTourneau, Samsung Austin Semiconductor
  • KU04: A 4 nm UPW MonitorDerek Oberreit, Kanomax FMT, Inc.
  • The Retrofitting of a Traditional UPW Make Up System to Accomplish Recovery Rates of >95% utilizing High Efficiency Reverse Osmosis (HERO) & the Challenges it Presents, Robert Kirwan, Intel Corporation
  • Risks Incurred by Morphology Change of Silica in Ion Exchange Resins and their CountermeasuresAtsushi Muramatsu, Kurita Water
  • UPW Controls Upgrades Online!!! – Yes, IT CAN BE DONE !!Scott Covington, Samsung Austin Semiconductor
  • Understanding Nanoparticle Contamination in Ultrapure Water Generation and Distribution, Dwight Beal, Particle Measuring Systems

Chems and Gases

  • SEMI Standards Roadmap for CMP Consumables MetrologyInna Skvortsova, SEMI
  • New Sampling Module for Ultra-low Level Cation, Anions, and Organic Acids in Air/GasesMaohua Pan, Air Liquide Electronics
  • Recent Industry Code Changes to Support Efficient Gas Delivery for Semiconductor FactoriesAnthony Lachawiec, Intel Corporation
  • Determination Of Hydride Impurities In Arsine Using GC-ICP-MSBlake Emery, CONCSI, Ltd.
  • Adsorption Behavior of Filters in Organic Solvents Under Multi-Metal ConditionsAnthony Ozzello, Entegris
  • Effects of Static Electricity on Voltage-sensitive Metrology for Chemical Delivery SystemsMichael Perkins, Mega Fluid Systems
  • Method Development for Trace Metal Impurities in Novel Sub-nm Photoresists by Inductively Coupled Plasma Mass Spectrometry (ICP-MS)Mohsina Islam, ChemTrace
  • When Should Skew Corrected Control Limits be Updated?, Thomas Bzik, Versum Materials

Airborne Molecular Contamination

  • Water Moisture/Oxygen Control in the FOUP when FOUP Door is in Open Conditions for Sub-20 nm Processes by Purge and Isolation TechnologyProfessor Shih-Cheng Hu, National Taipei University of Technology
  • How to Assess the Performance of Molecular Filters? From Laboratory Tests to In-situ Efficiency MeasurementsGuillaume Gallet, Camfil
  • A Retrospective Review of AMC Issues: Our Understanding and Issues Incurred, Walter Den, Texas A&M University – San Antonio
  • The Challenges of Improving Sensitivity and Speed of Response for Detecting Airborne Molecular Contaminants in CleanroomsFlorian Adler, Tiger Optics
  • Accurate Performance Predictions of AMC Filters through Optimized Test ParametersBaoquan Xie, Entegris
  • Illuminating the Interactions of Airborne Molecular Contamination and Cleanroom Procedures to Improve Product CleanlinessVictor Chia, Air Liquide Electronics – Balazs NanoAnalysis
  • Comprehensive Online AMC Analysis Using SIFT-MSHelena Barnes, Syft Technologies
  • Analysis of Witness Wafers with UNISERS Wafer Particle ScannerFabian Walter, UNISERS