UPM 2022 Agenda

Explore the Ultrapure Micro 2022 agenda, day-by-day, using the two buttons below. Interested in a specific part of the agenda? You can find data-driven technical presentations that speak to your specific segment of the market. Scroll down below and filter through our abstracts using any of the following categories: Ultrapure Water, Chemicals, AMC/Gases, Waste Water, Energy, and Construction.
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Urea treatment technologies in UPW systems – a Review

Noga Fridman-Bishop, FTD Solutions

Clean UPW Sampling in Facility Environment: Solutions to Minimize Cross-contamination

Jerome Gaering, Ovivo

Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current status, Practical Examples and More

Stefan Huber, DOC-LABOR

Study on Membrane Distillation Application for Ultrapure Water Production.

Gyeong Sum Kim, K-Water 

Removal of Anions from Water and Isopropyl Alcohol (IPA) Using Membrane-Based Solutions

Siddarth Sampath, Entegris

Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current Status, Practical Examples and More

Stefan Huber, DOC-LABOR

Multi-Species PPT-Level Impurity Detection in Electronic Bulk Gases Using Atmospheric Pressure Ionization Mass Spectrometry

Erika Coyne, Process Insights 

UPW Distribution Design, Operation, and Risk Management in Facility 2.0.

Lindsey Sullivan, FTD Solutions

Developed localization technology for MDG Process with Improved Dissolved Oxygen Removal Efficiency

Boungsu Kwon, K-water

Yield and Reliability
Critical Organics Risk Assessment of High-Purity Polymer Piping

Gary Van Schooenveld, CT Associates

Yield and Reliability
Online automated determination of organic contaminants in semiconductor grade chemicals

Alex Lang, Elemental Scientific 

Yield and Reliability
Real time AMC Monitoring with Novel Chemical Ionization Mass Spectrometry at Single Digit Pptv Concentrations

Felipe Lopez-Hilfiker, Tofwerk

Yield and Reliability
On-Wafer Defectivity Analysis of UPW with Successive Spin Drying.

Ali Ozhan Altun, UNISERS

Yield and Reliability
Measurement of Particle Concentration and Wafer Defects During Ion Exchange Resin Rinse

Derek Oberreit, Kanomax FMT

Yield and Reliability
Interconnect Metal Recess using Functional Water Solutions for Next-Generation Semiconductor Device manufacturing

Nobuko Gan, Kurita Water 

Yield and Reliability
Study on How Ultrapure Water Could Contribute to Particle Types Identified on Wafer, and How Ion Exchange Resin Selection Could Make a Difference

Yoichi Tanaka, Kurita Water Industries and and  Jas Wai Yeng Cheong, Intel 

Yield and Reliability
Establishing Correlations Between UPW Quality and Particle Deposition on Silicon 300 mm Wafer

Alois Goller and Philippe Rychen, Lam Research

Environmental Footprint
RO Membrane Protection through Efficient Dechlorination Control with Direct, Accurate and Automatic Measurement of Low-PPB Chlorine Residual
Denton Slovacek, Hach
Environmental Footprint
Membrane distillation: a solution to PFAS removal and energy optimization in the semiconductor industry
Andreas Tornblom, Xzero AB
Environmental Footprint
PFAS – The Next Great Wastewater Challenge
Taimur Burki, Intel
Environmental Footprint
Microelectronics Reuse of Wastewater with Abrasive Solids using Ceramic Membranes
Nori Kanamori, Meiden America
Environmental Footprint
Eco Efficiency in Ultrapure Water Treatment System Design and Operation and Site Water/Energy Relationship

Bob McIntosh, Enviro Energy Solutions.

Environmental Footprint
Sustainable Water Treatment and Recycling Using Novel Hollow Fiber Nanofiltration

Jörg Winter, DAS 

Environmental Footprint
Conserving Energy and Water Through Recapture and Recirculation of Hot UPW

Charles Miller, SCREEN

Environmental Footprint
Point-of-Use Abatement System Water Usage Minimization and Optimization

Adam Stover, Centrotherm Clean Solutions,

Environmental Footprint
The Value of Waste Water

Gerd Heser and Jochen Ruth, Pall

Environmental Footprint
Recycle of SPM in Single-Wafer Process Applications

Charles Miller, SCREEN

Environmental Footprint
Case Study: High Recovery PFRO for Brine Minimization in a Semiconductor FAB

Matan Hameiry, IDE Water Technologies

Facilities Growth
Gas Analytical Needs and Expectations for EUV nodes

Kristine Andrysco, Samsung Austin Semiconductor

Facilities Growth
Advanced Technology Design for Hot UPW Supply

Ute Sierig, GlobalFoundries

Facilities Growth
Why should you care about Cafeteria Grease Trap cleaning? Chasing Root Cause of Cu Corrosion Defects
Latif Ahmed,  Intel
Facilities Growth
The case for Prefabrication/Pre-assembly of Preloaded Piping Racks with Full Design Services

John Painter, Georg Fischer

Facilities Growth
RE-USING UPW PVDF PIPE – Can we re-use PVDF pipe for UPW?
Katrin WallheinkeGF Piping Systems
 
Facilities Growth
Compressed Air Operational Analysis to Gain Capacity and Improve Efficiency

Matthew Milan, Samsung Austin Semiconductor

Facilities Growth
Streamlining Data Driven Decisions to Support Facility 2.0 Needs

Gil Maron, FTD Solutions