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Airborne Molecular Contamination Chemicals Reuse and Recycle Critical Components Digitization Energy Conservation ESG Targets Fab Construction / Procurement / Supply Chain Materials of Construction HVAC / Exhaust / Mechanical Industrial Development and Infrastructure Management Ultra-High Performance Chemicals Ultrapure Water Quality and Production Water Management and Wastewater Treatment
Urea treatment technologies in UPW systems – a Review
Noga Fridman-Bishop , FTD Solutions
Clean UPW Sampling in Facility Environment: Solutions to Minimize Cross-contamination
Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current status, Practical Examples and More
Study on Membrane Distillation Application for Ultrapure Water Production.
Removal of Anions from Water and Isopropyl Alcohol (IPA) Using Membrane-Based Solutions
Siddarth Sampath, Entegris
Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current Status, Practical Examples and More
Multi-Species PPT-Level Impurity Detection in Electronic Bulk Gases Using Atmospheric Pressure Ionization Mass Spectrometry
Erika Coyne, Process Insights
UPW Distribution Design, Operation, and Risk Management in Facility 2.0.
Lindsey Sullivan, FTD Solutions
Developed localization technology for MDG Process with Improved Dissolved Oxygen Removal Efficiency
Yield and Reliability
Critical Organics Risk Assessment of High-Purity Polymer Piping
Gary Van Schooenveld, CT Associates
Yield and Reliability
Online automated determination of organic contaminants in semiconductor grade chemicals
Alex Lang, Elemental Scientific
Yield and Reliability
Real time AMC Monitoring with Novel Chemical Ionization Mass Spectrometry at Single Digit Pptv Concentrations
Felipe Lopez-Hilfiker, Tofwerk
Yield and Reliability
On-Wafer Defectivity Analysis of UPW with Successive Spin Drying.
Yield and Reliability
Measurement of Particle Concentration and Wafer Defects During Ion Exchange Resin Rinse
Derek Oberreit , Kanomax FMT
Yield and Reliability
Interconnect Metal Recess using Functional Water Solutions for Next-Generation Semiconductor Device manufacturing
Yield and Reliability
Study on How Ultrapure Water Could Contribute to Particle Types Identified on Wafer, and How Ion Exchange Resin Selection Could Make a Difference
Yoichi Tanaka, Kurita Water Industries and and Jas Wai Yeng Cheong, Intel
Yield and Reliability
Establishing Correlations Between UPW Quality and Particle Deposition on Silicon 300 mm Wafer
Alois Goller and Philippe Rychen, Lam Research
Environmental Footprint
RO Membrane Protection through Efficient Dechlorination Control with Direct, Accurate and Automatic Measurement of Low-PPB Chlorine Residual
Environmental Footprint
Membrane distillation: a solution to PFAS removal and energy optimization in the semiconductor industry
Andreas Tornblom, Xzero AB
Environmental Footprint
PFAS – The Next Great Wastewater Challenge
Environmental Footprint
Microelectronics Reuse of Wastewater with Abrasive Solids using Ceramic Membranes
Nori Kanamori, Meiden America
Environmental Footprint
Eco Efficiency in Ultrapure Water Treatment System Design and Operation and Site Water/Energy Relationship
Bob McIntosh , Enviro Energy Solutions.
Environmental Footprint
Sustainable Water Treatment and Recycling Using Novel Hollow Fiber Nanofiltration
Environmental Footprint
Conserving Energy and Water Through Recapture and Recirculation of Hot UPW
Environmental Footprint
Point-of-Use Abatement System Water Usage Minimization and Optimization
Adam Stover , Centrotherm Clean Solutions,
Environmental Footprint
The Value of Waste Water
Gerd Heser and Jochen Ruth , Pall
Environmental Footprint
Recycle of SPM in Single-Wafer Process Applications
Environmental Footprint
Case Study: High Recovery PFRO for Brine Minimization in a Semiconductor FAB
Matan Hameiry , IDE Water Technologies
Facilities Growth
Gas Analytical Needs and Expectations for EUV nodes
Kristine Andrysco, Samsung Austin Semiconductor
Facilities Growth
Advanced Technology Design for Hot UPW Supply
Ute Sierig, GlobalFoundries
Facilities Growth
Why should you care about Cafeteria Grease Trap cleaning? Chasing Root Cause of Cu Corrosion Defects
Facilities Growth
The case for Prefabrication/Pre-assembly of Preloaded Piping Racks with Full Design Services
John Painter, Georg Fischer
Facilities Growth
RE-USING UPW PVDF PIPE – Can we re-use PVDF pipe for UPW?
Katrin Wallheinke ,
GF Piping Systems
Facilities Growth
Compressed Air Operational Analysis to Gain Capacity and Improve Efficiency
Matthew Milan, Samsung Austin Semiconductor
Facilities Growth
Streamlining Data Driven Decisions to Support Facility 2.0 Needs
