UPM 2022 Agenda

Explore the Ultrapure Micro 2022 agenda, day-by-day, using the two buttons below. Interested in a specific part of the agenda? You can find data-driven technical presentations that speak to your specific segment of the market. Scroll down below and filter through our abstracts using any of the following categories: Ultrapure Water, Chemicals, AMC/Gases, Waste Water, Energy, and Construction.
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Study on Membrane Distillation Application for Ultrapure Water Production.

Gyeong Sum Kim, K-Water 

Energy
Ultrapure Water
Study on How Ultrapure Water Could Contribute to Particle Types Identified on Wafer, and How Ion Exchange Resin Selection Could Make a Difference

Yoichi Tanaka, Kurita Water Industries and and  Jas Wai Yeng Cheong, Intel 

Ultrapure Water
Yield and Reliability
Online automated determination of organic contaminants in semiconductor grade chemicals

Alex Lang, Elemental Scientific 

Chemicals
Yield and Reliability
Removal of Anions from Water and Isopropyl Alcohol (IPA) Using Membrane-Based Solutions

Siddarth Sampath, Entegris

Chemicals
Ultrapure Water
Yield and Reliability
Clean UPW Sampling in Facility Environment: Solutions to Minimize Cross-contamination

Jerome Gaering, Ovivo

Ultrapure Water
Yield and Reliability
Interconnect Metal Recess using Functional Water Solutions for Next-Generation Semiconductor Device manufacturing

Nobuko Gan, Kurita Water 

Chemicals
Yield and Reliability
Multi-Species PPT-Level Impurity Detection in Electronic Bulk Gases Using Atmospheric Pressure Ionization Mass Spectrometry

Erika Coyne, Process Insights 

AMC/ Gases
Yield and Reliability
Real time AMC Monitoring with Novel Chemical Ionization Mass Spectrometry at Single Digit Pptv Concentrations

Felipe Lopez-Hilfiker, Tofwerk

AMC/ Gases
Yield and Reliability
On-Wafer Defectivity Analysis of UPW with Successive Spin Drying.

Ali Ozhan Altun, UNISERS

Ultrapure Water
Yield and Reliability
Critical Organics Risk Assessment of High-Purity Polymer Piping

Gary Van Schooenveld, CT Associates

Ultrapure Water
Yield and Reliability
Establishing Correlations Between UPW Quality and Particle Deposition on Silicon 300 mm Wafer

Alois Goller and Philippe Rychen, Lam Research

Ultrapure Water
Yield and Reliability
Why should you care about Cafeteria Grease Trap cleaning? Chasing Root Cause of Cu Corrosion Defects
Latif Ahmed,  Intel
AMC/ Gases
Yield and Reliability
Measurement of Particle Concentration and Wafer Defects During Ion Exchange Resin Rinse

Derek Oberreit, Kanomax FMT

Ultrapure Water
Environmental Footprint
Sustainable Water Treatment and Recycling Using Novel Hollow Fiber Nanofiltration

Jörg Winter, DAS 

Waste Water
Environmental Footprint
RO Membrane Protection through Efficient Dechlorination Control with Direct, Accurate and Automatic Measurement of Low-PPB Chlorine Residual
Denton Slovacek, Hach
Ultrapure Water
Environmental Footprint
Membrane distillation: a solution to PFAS removal and energy optimization in the semiconductor industry
Andreas Tornblom, Xzero AB
Chemicals
Ultrapure Water
Waste Water
Environmental Footprint
PFAS – The Next Great Wastewater Challenge
Taimur Burki, Intel
Waste Water
Environmental Footprint
Microelectronics Reuse of Wastewater with Abrasive Solids using Ceramic Membranes
Nori Kanamori, Meiden America
Waste Water
Environmental Footprint
Eco Efficiency in Ultrapure Water Treatment System Design and Operation and Site Water/Energy Relationship

Bob McIntosh, Enviro Energy Solutions

Energy
Ultrapure Water
Waste Water
Environmental Footprint
Case Study: High Recovery PFRO for Brine Minimization in a Semiconductor FAB

Matan Hameiry, IDE Water Technologies

Waste Water
Environmental Footprint
Conserving Energy and Water Through Recapture and Recirculation of Hot UPW

Charles Miller, SCREEN

Chemicals
Ultrapure Water
Waste Water
Environmental Footprint
Point-of-Use Abatement System Water Usage Minimization and Optimization

Adam Stover, Centrotherm Clean Solutions,

Waste Water
Environmental Footprint
The Value of Waste Water

Gerd Heser and Jochen Ruth, Pall

Energy
Waste Water
Environmental Footprint
Recycle of SPM in Single-Wafer Process Applications

Charles Miller, SCREEN

Chemicals
Facilities Growth
Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current status, Practical Examples and More

Stefan Huber, DOC-LABOR

Ultrapure Water
Facilities Growth
Analysis of Organics in UPW Plants with LC-OCD (Liquid Chromatography - Organic Carbon Detection): Current Status, Practical Examples and More

Stefan Huber, DOC-LABOR

Ultrapure Water
Facilities Growth
Developed localization technology for MDG Process with Improved Dissolved Oxygen Removal Efficiency

Boungsu Kwon, K-water

Energy
Ultrapure Water
Facilities Growth
UPW Distribution Design, Operation, and Risk Management in Facility 2.0.

Lindsey Sullivan, FTD Solutions

Ultrapure Water
Facilities Growth
Gas Analytical Needs and Expectations for EUV nodes

Kristine Andrysco, Samsung Austin Semiconductor

AMC/ Gases
Facilities Growth
Advanced Technology Design for Hot UPW Supply

Ute Sierig, GlobalFoundries

Ultrapure Water
Facilities Growth
The case for Prefabrication/Pre-assembly of Preloaded Piping Racks with Full Design Services

John Painter, Georg Fischer

Construction
Facilities Growth
RE-USING UPW PVDF PIPE – Can we re-use PVDF pipe for UPW?
Katrin WallheinkeGF Piping Systems
 
Ultrapure Water
Facilities Growth
Compressed Air Operational Analysis to Gain Capacity and Improve Efficiency

Matthew Milan, Samsung Austin Semiconductor

Energy
Facilities Growth
Streamlining Data Driven Decisions to Support Facility 2.0 Needs

Gil Maron, FTD Solutions

Energy
Waste Water
Facilities Growth
Urea treatment technologies in UPW systems – a Review

Noga Fridman-Bishop, FTD Solutions

Ultrapure Water