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Ultrapure Micro 2023 is set to present 40+ data-driven technical presentations. Each has been selected for its practical value, focus on critical end user challenges, and capacity to drive industry best-practise forwards. Alongside panel discussions, roundtables, networking and more, these presentations form the core of the UPM conference offering, providing immediately practical insights to inform your current operations. Connect, collaborate, and advance – Click here to book your place at UPM 2023

Find the presentations most relevant to your job title. Filter from the 43 presentations to be presented in 2023 below:

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High Purity Environments
Interaction of Nanoparticles with Ion Exchange Resin Beds in UPW polish systems

Presented by:
Lisa Klammsteiner, Innovation Engineer Nanotechnologies, Ovivo

Co-Author(s):
Pranit Iyengar, Innovation Engineer, Ovivo

Philippe Rychen, Global Director of Innovation, Ovivo

Pia Herrling, Head of Nanoparticle Group and Project Manager Innovation, Ovivo

Prof. Dr. Gisela Guthausen, Karlsruhe Institute of Technology, Germany

 

Ultrapure Water Quality and Production
High Purity Environments
Use of Fluorescent Molecules as Surrogate Nano-contaminants to Monitor the Integrity of Reverse Osmosis Membranes in Ultrapure Water Systems

Presented by:
Seong Hoon Yoon, Corporate Scientist, Nalco Water

Ultrapure Water Quality and Production
High Purity Environments
Use of Hybrid metrology approach to develop holistic filtration solutions in Hydrogen Peroxide

Kusum Maharjan, Applications Manager, Entegris
Siddarth Sampath, Application Engineer, Entegris

Ultra-High Performance Chemicals
High Purity Environments
Advancing process control based on enhanced particle counter matching at the 20nm level

Presented by:
Dan Rodier, Staff Scientist, Particle Measuring Systems

Ultrapure Water Quality and Production
High Purity Environments
Predicting filtration performance using native particles

Presented by:
Siddarth Sampath, Applications Manager, Entegris

Co-Author(s):
Jamie Chung, Application Engineer, Entegris

Ultra-High Performance Chemicals
High Purity Environments
Application of a New SEMI F121 Guide for Evaluating Particle Precursor Metrology

Presented by:
Mark Litchy, Staff Engineer, CT Associates Inc.

Co-Author(s):
Derek Oberreit, Vice President, Kanomax FMT
Bonnie Marion, Technology Director, FTD Solutions
Gary Van Schooneveld, President, CT Associates Inc.
Larry Zazzera, Corporate Scientist, CT Associates Inc.

Ultrapure Water Quality and Production
High Purity Environments
A study on the defectivity of particle precursors using surface enhanced Particle sizing (SEPS)

Presented by:
Ali Altun, CEO and Co-Founder, UNISERS

Ultrapure Water Quality and Production
High Purity Environments
A novel nanoparticle counter for UPW based on acoustic cavitation

Presented by:
Najib Alia, Innovation Engineer, Ovivo

Co-Author(s):
Ian Briggs, Ovivo
Pranit Iyengar, Innovation Engineer, Ovivo
Pia Herrling, Head of Nanoparticle Group and Project Manager Innovation, Ovivo
Philippe Rychen, Global Director of Innovation, Ovivo

Ultrapure Water Quality and Production
High Purity Environments
Identification and Management of Potential Particle Precursors from Mixed Bed Ion Exchange

Presented by:
Larry Zazzera, Corporate Scientist, CT Associates, Inc

Co-Author(s):
Stefan Huber, DOC-LABOR
Gary Van Schooneveld, President, CT Associates
Bonnie Marion, Technology Director, FTD Solutions

 

Ultrapure Water Quality and Production
High Purity Environments
Predicting Hydrogen Peroxide concentration for effective control in Ultrapure Water Polishing Loop

Presented by:
Ferdinando Crapulli, Research Scientist, Trojan Technologies

Co-Author(s):
Michael Sasges, Senior Research Engineer, Trojan Technologies

Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
High Purity Environments
A surprising result when PVDF pipe installed for 9 years was tested for extractables

Presented by:
Robert McIntosh, Technical Market Manager, GF Piping Systems

Co-Author(s):
Casey Williamson, ME Market Development Manager, GF Piping Systems

Ultrapure Water Quality and Production
High Purity Environments
Impact of H2O2 Concentration in UPW on (Ultra) Filters Performance

Presented by:
Jochen Ruth, SLS Director Microelectronics Europe, Pall GmbH

Co-Author(s):
Gerd Heser, Application Manager UPW & Systems, Pall GmbH
Philippe Rychen, Global Director of Innovation, Ovivo

Ultrapure Water Quality and Production
High Purity Environments
Advancements in PTR-TOF Technology for Improved Real-Time AMC Monitoring

Presented by:
Jens Herbig, Chief Technology Officer, IONICON Analytik

Airborne Molecular Contamination
High Purity Environments
Online monitoring of traditional and emerging airborne molecular contaminants at pptv concentrations

Presented by:
Carla Frege, Application Scientist, Tofwerk

Co-Author(s):
Felipe Lopez, Tofwerk

Airborne Molecular Contamination
High Purity Environments
Next Generation Filters for On-Wafer Defect Control with Fine-Purification Solutions for IPA and other Aqueous Solvents (targeted retention) for Microelectronics Application

Presented by:
Varun Vakharia, R&D Manager, Pall Corporation

Co-Author(s):
Sam Tang, Global Product Manager, Pall Corporation
Katsuhiko Tokuno, Pall Corporation

Ultra-High Performance Chemicals
Ultrapure Water Quality and Production
High Purity Environments
Determination of trace level organic contamination leached from HDPE containers used for semiconductor solvents and recovery and identification of organic residues on wafer surfaces using these contaminated solvents

Presented by:
Brianna Dufek, Chemist, Elemental Scientific

Co-Author(s):
Suhas Ketkar, Marketing Leader, Elemental Scientific
Austin Schultz, Engineer, Elemental Scientific 

Ultrapure Water Quality and Production
Environmental Sustainability
Case studies on semiconductor ultrapure water and wastewater reclamation using the latest generation of RO Membranes

Presented by:
Satoru Ishihara, Chief Engineer, Nitto Denko Corporation, Japan

Co-Author(s):
Yasuhiro Tomi, Manager, Nitto Denko Corporation, Japan
David Shin, Application Development Manager, Hydranautics

Energy Conservation
Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
Environmental Sustainability
Developing Water Reclaim Solutions for Existing Fabs

Presented by:

Hiep Le, Chief Technology Officer, East Hemisphere, Gradiant

Co-Author(s):
Kurt Blohn, Process Engineer, Gradiant

John Tracy, VP of Sales and Business Development, Gradiant

ESG Targets
Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
Environmental Sustainability
Systematic Process Technology Selection for treating SiC containing Waste Water

Presented by:
Jochen Ruth, SLS Director, Pall GmbH

Co-Author(s):
Gerd Heser, Director of Product Planning and Management Water, Pall GmbH

ESG Targets
Water Management and Wastewater Treatment
Environmental Sustainability
Overcoming challenges in reclaiming wet bench rinse waters back into a UPW system

Presented by:
Glen Sundstrom, UPW Techncial Director, Evoqua Water Technologies

Co-Author(s):
Stephen Witt, Facilities Engineer, Silfex, Inc.

Water Management and Wastewater Treatment
Environmental Sustainability
Water reclamation into UPW systems

Presented by:
Carles Crespo, Director of Corporate Industrial Water Practice, Isle Group Ltd.
Mattias Espanet, Facilities Process Program Manager, STMicroelectronics

Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
Environmental Sustainability
Building a more Sustainable Cu-CMP Process: Selective Copper Removal and Recovery

Presented by:
Cameron Lippert, Chief Innovation Officer, ElectraMet

Co-Author(s):
James Landon, CTO, ElectraMet
Alan Rassoolkhani, Process Engineering Manager,  ElectraMet

Chemicals Reuse and Recycle
Critical Components
Digitization
ESG Targets
Water Management and Wastewater Treatment
Environmental Sustainability
Environmental Sustainability - Introductory Panel

Sustainability is an industry priority. However, with the incorporation of sophisticated new semiconductor technology such as Gate-All-Around (GAA) transistors, the industry’s water, energy, chemical and gas footprint is set to increase rapidly. This panel will bring in multiple thought-leaders from across the industry to explain what is driving the sustainability effort and where the key capability gaps lie.  

This panel will answer three key questions: 

  1. How will GAA and other semiconductor developments affect those working in the sustainability field? 
  2. Where are facilities focusing their efforts in offsetting their footprints?
  3. How do facilities manage trade-offs and difficult decisions relating to sustainability? 

Moderated by:

  • Alan Knapp, Senior Director, Microelectronics Market, Evoqua Water Technologies

Speakers:

  • Nabil Mistkawi, Principal Engineer/Technologist, Samsung Austin Semiconductor
  • Walt Kozlowski, Sr. Director Client Sustainability Solutions, Evoqua Water Technologies
  • Jim Snow, Senior Technologist, SCREEN SPE
Environmental Sustainability
Not-So-Forever Chemicals: Field Demonstration of PFAS Destruction by a Pilot-Scale Nanofiltration and UV-Sulfite Treatment Train

Presented by:
Charlie Liu, National PFAS Lead, Kennedy Jenks Consultants

Water Management and Wastewater Treatment
Environmental Sustainability
Process Cooling Water (PCW) Reliability Improvement

Presented by:
Heather Reese, Senior Corporate Account Manager, Nalco Water, An Ecolab Company

Co-Author(s):
Brian Jenkins, Senior Marketing Manager, Microeletronics, Nalco Water, An Ecolab Company

Critical Components
Digitization
Energy Conservation
ESG Targets
HVAC / Exhaust / Mechanical
Water Management and Wastewater Treatment
Environmental Sustainability
Balancing ESG Goals and Zero Liquid Discharge

Presented by:
Michael Lesniak, VP Net Zero Partnerships, Aquatech International

Co-Author(s):
Ben Means, Manager, Project Development, Aquatech International

Taylor Cowan, Marketing Communication Manager, Aquatech International

Josh Best, VP of Innovation, FTD Solutions

Ravi Chidambaran, President & Chief Technology Officer, Aquatech International

Boris Eliosov, Chief Technology Officer, FTD Solutions

ESG Targets
Industrial Development and Infrastructure Management
Water Management and Wastewater Treatment
Environmental Sustainability
Optimization of the primary pure water system configuration and new operational control for enabling minimal energy consumption on ultrapure water producing systems

Presented by:
Masahito Tochinai, Researcher, Kurita Water Industries

Co-Author(s):
Yasuharu Minato, Researcher, Kurita Water Industries
Midori Miyaji, Kurita Water Industries
Hideaki Iino, Team Lead Manager, Kurita Water Industries
Yoichi Miyazaki, Kurita Water Industries
Takeo Fukui, Kurita Water Industries

ESG Targets
Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
Environmental Sustainability
Azoles removal from CMP wastewater – Oxidation vs. Novel Complexation Method

Presented by:
Rudy Labban, Bid Manager, Veolia Water Technologies & Solutions

Water Management and Wastewater Treatment
Environmental Sustainability
Reclaim of Ozonated Water

Presented by:
Rey Tanaka, Product Engineer, Screen SPE

Co-Author(s):
Paul Kerr, Strategic Facilities Engineer, Intel
Jim Snow, Senior Technologist, Screen SPE

Chemicals Reuse and Recycle
Water Management and Wastewater Treatment
Environmental Sustainability
Suggestions of eco-friendly RO membrane operation (focused on K-water's RO plant)

Presented by:
Yubeen Ji, Manager, K-Water

Critical Components
Energy Conservation
Water Management and Wastewater Treatment
Environmental Sustainability
PFAS Analysis in UPW and Process Water

Presented by:
Allen Chan, R&D Scientist, Air Liquide

Co-Author(s):
Hugh Gotts, Senior Director of Research Development, Air Liquide

Ultrapure Water Quality and Production
Environmental Sustainability
Water and Energy Nexus: Resolving Conservation Challenges in the Refinery Industry and Its Relevance to the Semiconductor Sector

Presented by:
Gil Maron, Sr. Application Engineer, FTD Solutions

Co-Author(s):
Tomer Mori, CTO, Ashdod Refinery
Mark Kaganovsky, Site Water Engineer, Ashdod Refinery

Digitization
Energy Conservation
ESG Targets
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
A paradigm shift for wastewater recycling operations using AI

Presented by:

Mike DixonCEO - SmartOps, Gradiant

 

Co-Author(s):
Hiep Le, Chief Technology Officer, East Hemisphere, Gradiant International Holdings Pte Ltd

Jia Shin Ho, New Product Initiative (NPI) Scientist, Gradiant International Holdings Pte Ltd

Digitization
Energy Conservation
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Intelligent P&IDs: Building & Operating More Efficiently

Presented by:

John Painter, Principal, Pure Facilities Solutions LLC
Daniel Williams, Senior Industry Consultant, Hexagon Engineering & Design Solutions

Energy Conservation
ESG Targets
Fab Construction / Procurement / Supply Chain Materials of Construction
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Digitalized MLD and ZLD: Optimizing Through Modularization of Membrane and Thermal Systems

Presented by:
Geer Qile, Manager of Process Solutions, Saltworks

Co-Author(s):
Ben Sparrow, CEO, Saltworks
Pierce Maguire, Technology Specialist & Manager of Marketing, Saltworks

Digitization
Energy Conservation
ESG Targets
Fab Construction / Procurement / Supply Chain Materials of Construction
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Modular OSM Constructs for Improved Cost, Schedule, EHS and Environmental Benefit

Presented by:
Scott Corney, Technical Domain Leader - Microelectronics, Veolia Water Technologies & Solutions

Ultrapure Water Quality and Production
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Unlocking Opportunities for Reaching Sustainability Goals for Existing and New Fab’s

Presented by:
Gil Maron, Sr. Application Engineer, FTD Solutions

Co-Authors

Hwee Kiang Lee, Senior Member of Technical Staff & Water Pillar Lead for Sustainability, Micron

Deena Starkel, Principal Water Engineer, Micron

 

Digitization
ESG Targets
Fab Construction / Procurement / Supply Chain Materials of Construction
Industrial Development and Infrastructure Management
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Leveraging data driven workflows to shorten the design change lifecycle

Presented by:
Brandon Ekberg, Principal, Farnsworth Group
Darin Amsberry, Director of Process Piping, Farnsworth Group

Digitization
Facilities’ Growth & Efficiency
Suitability evaluation of PVC and PVDF pipes for ultrapure water production system

Hyejoo Park, Ph. D Student, Korea Advanced Institute of Science and Technology (KAIST)
Dr. Seoktae Kang, Associate Professor, Korea Advanced Institute of Science and Technology (KAIST)
Sion Kim, Masters Student, Korea Advanced Institute of Science and Technology (KAIST)

Industrial Development and Infrastructure Management
Ultrapure Water Quality and Production
Facilities’ Growth & Efficiency
Trouble shooting list during a trial run in a new UPW system (100m3/hr)

Presented by:
Myounghun Lee, Senior UPW Specialist, Future Water Resources Management Department, K-Water

Fab Construction / Procurement / Supply Chain Materials of Construction
Ultrapure Water Quality and Production
Facilities’ Growth & Efficiency
HFRO: A Capacity Crunch Paves the Road to Future Development

Presented by:
Tyler Goldstoff, Senior Engineer Facilities Engineering - UPW/WWT, GlobalFoundries

Co-Author(s):
Diwakar Paramasivam, Manager Facilities Engineering & Operations, GlobalFoundries
Zeph Egnasher, Facilities Engineer, GlobalFoundries

Chemicals Reuse and Recycle
Energy Conservation
ESG Targets
Fab Construction / Procurement / Supply Chain Materials of Construction
Industrial Development and Infrastructure Management
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Municipal waste treatment chemical inhibitors and the impacts on facilities waste treatment system design.

Presented by:
Brandon Ekberg, Principal, Farnsworth Group

Zeph Egnasher, Facilities Engineer, Ultrapure Water/WWT Process Support, GlobalFoundries

Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Energy and water use efficiency considerations in Ultrapure and wastewater system design and operation for semiconductor fabs

Presented by:
Andreas Neuber, SR Director for Eco Efficiency and Sustainability, Applied Materials

Energy Conservation
HVAC / Exhaust / Mechanical
Water Management and Wastewater Treatment
Facilities’ Growth & Efficiency
Accelerating Water Technology Innovation in the Semiconductor Industry

Presented by:
Emile McCormick, Project and Partnerships Manager, FTD Solutions

Co-Author(s):
Bonnie Marion, Technology Director - Water Systems, FTD Solutions

Noga Fridman-Bishop, R&D Lead, Sr. Project Engineer, FTD Solutions

Josh Best, VP of Innovation, FTD Solutions

Slava Libman, CEO, FTD Solutions

ESG Targets
Ultrapure Water Quality and Production
Water Management and Wastewater Treatment

COMPANIES PRESENTING PAPERS AT UPM 2023 INCLUDE: